Other Equipments for Plasma Diagnostics
|
|
| l
ESPION Langmuire Probe (자동 분석을 포함한 플라즈마의 전기적인 특성분석) |
- Plasma Potential.
- Ion and Electron Densities.
- Electron Energy Distribution >5 orders resolution.
- Electron Temperature.
- Debye Length.
- Floating Potential.
- Pulsed Plasma Operation.
- Electron Retardation.
- Etching/Deposition/Cleaning Plasmas |
| l
PSM Mass and Energy Analyzer |
- Ion Beam Etching.
- Plasma Deposition Studies.
- Ion Implantation / Laser Ablation.
- Residual Gas Analysis.
- Leak Detection. |
| l
IDP Mass and Energy Analyzer |
- Rapid Mass / Energy monitoring
of evolved species.
- Transients / TOF Studies using gated input analysis.
- Parents and Radicals by Appearance Potential MS.
- Surface mass spectra, Ion yield measurements.
- Base Pressure Fingerprint.
- ESD and PAS thresholds, Ion energy distributions.
- Positive and negative ions, Bonding angle information.
- Leak Detection / Virtual Leaks / Desorption. |
| l
SIMS Workstation with EQS Ion Mass / Energy
Analyzer |
| l
EQS Secondary Ion Mass Spectrometer |
| l
IMP(Ion Milling Probe) End Point Detector |
|
