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EQP ½Ã½ºÅÛEQP Operating Modes  |
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|
Ion Energy Distributions
of selected +ve |
Mass Spectra
at selected ion energies for |
and -ve ions |
+ve ions, -ve ions and neutrals. |
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|
Appearance potential
spectra
|
Electron attachment
ionization scans to
identify radical species produced in the
Plasma from electronegative gases.
|
for identification of radical
species |
from parent stable molecules. |