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EQP ½Ã½ºÅÛÀÇ Æ¯Â¡
EQP ½Ã½ºÅÛ Operating Mode
EQP DATA
EQP MASsoft Software Operating Modes
EQP Systems for Plasma Applications in Etching-Deposition-Coating-Process Development
Other Equipments for Plasma Diagnostics
¡¡ EQP ½Ã½ºÅÛEQP Operating Modes
Ion Energy Distributions of selected +ve
Mass Spectra at selected ion energies for
and -ve ions
+ve ions, -ve ions and neutrals.
Appearance potential spectra
Electron attachment ionization scans to
identify radical species produced in the
Plasma from electronegative gases.
for identification of radical species
from parent stable molecules.