HIDEN사의 Gas Analyzer인 QIC-20 시리즈는 대기압 상태에서 실시간 연속 시료 측정이 가능한 장비로써 여러 공정 시 발생하는 Gas들에 대한 monitoring 많이 사용되며 TG/TGA나 GC와 연동하여 사용하기도 한다.

- Catalysis
- Reaction Kinetics
- TPD/TPR/ TPO
- Thermal Analysis Mass Spectrometry
- Gas Purity Analysis
- Process Characterization
- Combustion Studies
- CVD/MOCVD

	TPD, TPO, TPR, TP-Reaction
	On-Line continuous product analysis
	Total Surface Area / Metal Surface Area
	Mechanisms of Surface Reactions
	Heats of Adsorption and Co-adsorption

	Analysis of mechanisms of decomposition and desorption.
	Quantitative TPD/ TPO / TPR, coupled with evolved gas analysis.
	Pyrolysis studies.
	Hot-Zone Sample Capillary
	QIC with fitted alumina sampling probe - no cold spots
	Standard 330 mm probe can be tailored to user specification
	¼” Swagelock coupling for simple, gas- tight connection
	By-pass permits user-defined sampling pressure / rate

Full system characterization including:
	Analysis of trace contaminants in feed streams.
	Base Pressure Fingerprint / Leak detection / chamber contaminants
	Virtual leaks / desorption / Outgassing / Bakeout analysis
	Data output in Profile / Trend / Tabular / PPM formats

Combined Thermal / Evolved Species analysis with:
	Analogue Temperature logging / control.
	Integration of peak areas with automatic background subtract.
	Fast acquisition multiple ion detection mode.