반도체 wafer의 박막 두께, 특성 측정 및 OCD Profile 제공 (Small foot print)
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
Due to their ability to measure a large range of OCD and thin film structures that cover current and future applications, the tools belonging to the LittleFoot-CD Series are used extensively for power device and MEMS applications, as well as for the most challenging applications of today’s semiconductor industry.
The n&k LittleFoot-CD Series provides tools that are fully automated with approximately 40% reduction in footprint, resulting in a significant savings in the utilization of fab space. This reduction in footprint is achieved through an innovative and patented wafer handling mechanism. The tools belonging to the n&k LittleFoot-CD series are as reliable and fast as any robot-based handing system, but at a much reduced cost.
Please note that the optics of the n&k LittleFoot-CD, and LittleFoot-CD450 are based on n&k’s new advance optical design. These tools have the same analytic capabilities as those of the OptiPrime-CD Series.